Language
EnglishEnglish
GermanGerman
JapaneseJapanese
FranceFrance
SwedenSweden
NetherlandsNetherlands
TurkeyTurkey
Russia<Russia

Follow us

facebook linkdin twitter whatsapp

Blogs

About Us

Blogs

Specifications of 8 inch N-type SiC Double-side Polished Substrate-we are an outstanding supplier of

published on 2025-04-24

The 8-inch N-type SiC double-side polished substrate is a silicon carbide wafer with a diameter of 8 inches (approximately 200 millimeters), processed through double-side polishing to achieve high flatness and smoothness, utilized in the manufacturing of high-power electronic devices such as power MOSFETs, Schottky diodes, and high-frequency RF devices due to its excellent material properties for efficient and reliable applications.

 

                                         Specifications of  8 inch N-type SiC Double-side Polished Substrate

Items Unit Ultra-P
 
Production Dummy
                                                                                          Boule Parameters
Polytype --                                           4H
Surface orientation error                                 4°toward<11-20>±0.5°
                                                                                         Electrical Parameters
Dopant --                                  n-type Nitrogen
Resistivity ohm.cm                                  0.015~0.025ohm.cm                    NA
                                                                                         Mechanical Parameters
Diameter mm                                  200.0±0.2mm
Thickness μm                                  350/500±25μm
Notch orientation                                  [1-100]±5
Notch Depth mm                                  1~1.5mm
LTV μm ≤3μm(10mm*10mm) ≤5μm(10mm*10mm) ≤15μm(10mm*10mm)
TTV μm ≤7μm ≤10μm ≤20μm
Bow μm -20μm~20μm -25 μm~25μm -65μm~65μm
Warp μm ≤30μm ≤35μm ≤70μm

Front(Si-face)Roughness(AFM)

nm                                 Ra≤0.2nm
                                                                                        Structure  
Micropipe density ea/cm² <0.2ea/cm² <2ea/cm² ≤50ea/cm²  
Metal impurities atoms/cm ≤1E11atoms/cm²(Al, Cr, Fe,Ni, Cu, Zn, Pb, Na, K, Ti, Ca,V, Mn)  
TSD ea/cm² ≤200ea/cm² ≤500ea/cm² NA  
 BPD ea/cm² ≤1000ea/cm² ≤2000ea/cm² NA  
TED ea/cm² ≤3000ea/cm² ≤7000ea/cm² NA  
                                                                                       Front Quality  
Front Si  

Surface 

Finish

Si - CMP Si-face CMP   
Particles ea/wafer ≤60(size≥0.3μm) ≤100(size≥0.3μm) NA  
Scratches ea/mm <5,Totallength≤1/2*Diameter <5,Totallength≤Diameter NA  
Edge chips/indents/cracks/stains/contamination --                 None  

Polytype area

--                 None  

Front laser 

marking

--                 None  
                                                                                      Back Quality  
Back finish --                C-face polished  
Scratches ea/mm                ≤5,Total Length≤Diameter  
Back defects (edge chips/indents) --                None NA  
Back roughness nm        Ra≤5nm  

Back laser 

marking

--                Notch  
                                                                                                     Edge  
Edge --               Chamfer  
                                                                                                     Packaging  
Packaging --               Epi-ready with vacuum packaging  
Packaging --              Multi-wafer or single wafer cassette packaging  

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

As an outstanding supplier of silicon carbide substrates, JXT TECHNOLOGY is committed to providing high-quality SiC materials.With advanced manufacturing processes and stringent quality control standards, we ensure our products exhibit excellent flatness and surface smoothness. As a supplier of silicon carbide materials, we focus on meeting customer demands and providing crucial support to the high-power electronic device manufacturing industry.

Share
2022 © SiC Wafers and GaN Wafers Manufacturer     网站统计