Physical Vapor Transport (PVT) Growth Process of Silicon Carbide (SiC) Single Crystals
published on 2025-04-24
Silicon carbide (SiC), as a third-generation semiconductor material, exhibits excellent physical and chemical properties, making it highly promising for applications in power electronics, RF devices, and high-temperature, high-frequency fields. Currently, the industrial preparation of SiC single crystals primarily relies on the Physical Vapor Transport (PVT) method, which utilizes high-temperature sublimation, vapor transport, and crystal growth to produce high-quality SiC boules. This paper provides a detailed explanation of the fundamental principles, process flow, key technical parameters, and challenges associated with the PVT method, along with possible improvements for future advancements.
Learn more >>